X-ray fluorescence spectrometers (XRF)
Expert XRF spectrometers for elemental composition analysis.
Malvern Panalytical offers a versatile range of X-ray fluorescence spectrometers and related products for elemental and thin film analysis. These XRF analyzers are suitable for a wide range of analysis and throughput requirements and operating environments. The spectrometers range from energy-dispersive benchtop XRF systems to wavelength-dispersive high-performance XRF systems and products for semiconductor measurement.
XRF spectrometers can be configured with dedicated software options for specific types of X-ray fluorescence analysis. In combination with application modules (application configuration, calibration and standards) or as a package with sample preparation products, complete analytical solutions are created.
| Measurement type/Model | ||||||
Smart Zetium for reliable results and robust operation | Small, powerful and portable XRF analyzer | Fast and accurate at-line elemental analysis | Direct insight in your production process | Advanced semiconductor thin film metrology solution | XRF of choice for highest throughput or shortest measurement time | |
| Thin film metrology | ✓ | ✓ | ✓ | ✓ | ||
| Elemental analysis | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| Contaminant detection and analysis | ✓ | ✓ | ✓ | ✓ | ||
| Elemental quantification | ✓ | ✓ | ✓ | ✓ | ✓ | |
| Chemical identification | ✓ | |||||
Technology | ||||||
| Wavelength Dispersive X-ray Fluorescence (WDXRF) | ✓ | ✓ | ✓ | |||
| Energy Dispersive X-ray Fluorescence (EDXRF) | ✓ | ✓ | ✓ | ✓ | ||
| Elemental range | Be-U | Na-Am | C-Am | Na-Am | Be-U | Be-U |
| LLD | 0.1 ppm - 100% | 1 ppm - 100% | 1 ppm - 100% | 1 ppm - 100% | 0.1 ppm - 100% | 0.1 ppm - 100% |
| Resolution (Mn-Ka) | 35 eV | 135 eV | 135 eV | 135 eV | 35 eV | 35 eV |
| Sample throughput | Up to - 240 per 8 h day | Up to - 80 per 8 h day | Up to - 160 per 8h day | On-line/ continuous | Up to 25 wafers per hour | Up to - 480 per 8 h day |
